• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    A pressure transducer utilises a diaphragm (10) made, for example, of ceramic or the like having upper and lower surfaces. One surface of the diagram (10) receives an elongate thick film resistor (20). Circuitry (30) is connected to the resistor (20) for measuring any changes in resistance due to strains or forces applied to the resistor. Pressures applied perpendicularly to the longitudinal direction of elongation of the resistor (20) produce high outputs in the form of changes in resistance which can be used to calculate strains in the longitudinal and transverse directions as well.
    公开号:SU1716979A3
    申请号:SU884356834
    申请日:1988-11-17
    公开日:1992-02-28
    发明作者:Скуратовски Юджин；Л.Стурдервант Майкл
    申请人:Дзе Бабкок Энд Вилкокс Компани (Фирма)；
    IPC主号:
    专利说明:

    The invention relates to a measurement technique, namely, to means for measuring the pressure of gases and liquids.
    The purpose of the invention is to increase reliability.
    Figure 1 shows the pressure transducer, top view; figure 2 is the same, side view; Fig. 3 is a diagram of the distribution of tangential and radial stresses over the membrane; 4 is a pressure measurement circuit using a transducer with a thick film strain gauge; Fig. 5 shows a pressure transducer with a ring-shaped thick-film strain gauge, the second option; Fig. 6 is a graph of resistance versus radius versus tangential and radial thick-film strain gauges; 7 is a pressure transducer with parallel
    strain gauges, the third option, top view; on Fig - the same, the fourth option, top view; figure 9 is the same, fifth variant, top view.
    The proposed method makes it possible to take advantage of the high sensitivity to normal deformation of thick-film resistors to increase the output signal with good noise characteristics and small deformations of the ceramic membrane. The total change in resistance for thick-film resistors can be determined from the expression dR
    R
     Shvh + Suvu + Strg + exh - er. (one)
    where Cx, Cy and Cz are the stress-sensitivity coefficients in the longitudinal, transverse and normal directions with respect to the resistor;
    -four
    About S 4 S

    s
    ex, eu, and ez are voltages in the longitudinal, transverse, and normal directions with respect to the resistor.
    The method makes it possible to use the resistivity sensitivity of the resistor along the normal to its plane to increase the output signal of the pressure transducer under the influence of the measured pressure.
    The pressure transducer of the first embodiment uses a single resistor that is oriented radially in the center of the membrane. The bridge measuring circuit is made outside or on the non-deformable part of the converter. With this configuration, radial and tangential voltages across the resistor area are used, as well as normal to the plane of the resistor. These stresses can be calculated as follows:
    ex (1-) a2 + (3 -3) xV PI:
    : 8p
    eu
    (1-) a2 + (gY -1) x2) (2)
    8l
    er v1 (- - ((1+ V) 2a2-. h2
    - {1 - -) 4x2).
    where ex, eu and ez are the radial, tangential and normal stresses, respectively; R. - applied pressure;
    vl / iv1 are the Poisson ratios for the substrate and the resistor, respectively;
    a is the radius of the membrane;
    Es and EG are Young's modules for resistor and substrate;
    h is the thickness of the diaphragm;
    x is the radius on which the resistor is mounted.
    The pressure transmitter contains an elastic membrane 1, on which thick-film compound resistance strain gages 2 and 3 are placed. The thick-film compound resistance strain gages are made by vacuum spraying. The measuring transducer, made in the first embodiment (Fig. 4), contains one thick-film strain gauge 4 in the middle of the membrane 1, which is connected to the bridge measuring circuit 5.
    The measuring transducer, made according to the second variant (FIG. 5), contains a strain gauge 6, made in the form of an open ring (C-shaped) and located on the periphery of the membrane.
    The measuring transducer, made according to the third variant (Fig.7), contains several strain gauges 7-10 in the center and on the periphery of the membrane, and
    strain gages are located in places of maximum deformation and parallel to each other. The Converter is made according to the fourth variant (Fig.8), contains two. thick film strain gauge 11 and 12,
    0 installed in the central part of the membrane on both sides of the center, made in the form of straight strips parallel to each other, and on the peripheral part of the membrane there are two thickness-mounted strain gauges 13 and 14, made C-shaped and diametrically opposed to each other. A measuring transducer made in accordance with the fifth version contains two C-shaped strain gauges 15 and 16 in the central part of the membrane and two C-shaped strain gauges 17 and 18 on the periphery of the membrane.
    The method is carried out as follows.
    A membrane with compacted thick-film strain gauges loaded on it is loaded with measured pressure, changes in the resistances of tenso-resistors, resulting from deformation of the membrane both along and across the direction of the strain gauges, are measured, and the pressure is determined by solving equations (1) and (2).
    5 The pressure transducer operates as follows.
    Under the action of the measured pressure, the membrane is deformed, the resistances of the compact thick-film strain gauges change under the influence of the strain, both along the orientation of the strain gauge and across, as well as normal to the surface of the strain gauge. Resistor resistance changes are recorded
    5, by measuring bridge circuit, on the basis of which pressure is determined.
    The sensitivity of the thick-film resistor in the normal direction is linear, and is absent.
    0 hysteresis.
    Thus, using the invention allows to obtain a high-precision, low-noise and low-power pressure converter.
    5 In general, the compound of the resistor has a dielectric and a conductive component. The dielectric component may contain a borosilicate, lead-borosilicate, alumino-silicate or lead-silicate type of glass with possible minor additions of oxide like CdO, CaO3 or Conductive component may be in the form of a noble metal (silver, gold, palladium) or an oxide, or a mixture thereof, or a conductive oxide of a noble metal.
    The use of a thick-film resistor with a lower resistivity and a large size makes it possible to obtain a reduction in the explosive noise of ceramic-thick film pressure transducers. Tests of available ceramic-thick-film pressure transducers with bridge impedances of about 5000 cm made it possible to obtain noise levels up to 0.15% of the nominal signal. Thick-film resistors with low conductivity, large size and resistance of 5000 Ohms give noise levels of 0.025% of the nominal signal.
     By increasing the yield of the thick-film resistor when using its sensitivity in the normal direction, small forces in the diaphragm are necessary. In this case, the reliability of the conversion bodies increases.
    If lower energy consumption is required, the conductivity of the thick film can be increased by slightly more noise, while maintaining the same maximum voltage level in the membrane and the same output signal.
    Fig. 5 shows a converter in which an annular thick-film resistor 6 is mounted on the membrane 11 in the vicinity of the outer circumference of the membrane. This resistor is also connected to a circuit for measuring resistance changes. The result is a slightly lower yield, since the radial and tangential stresses have opposite signs.
    The device uses the ability of a thick-film resistor to measure voltage in any direction. External sensors, which in known pressure transducers are oriented to measure radial voltage, are used to measure tangential voltage along the axis of the resistor and radial voltage, perpendicular to the axis of the resistor (Fig.7, 8 and 9). Resistors form annular regions at the outer edge of the diaphragm. This leads to the fact that dR / R for a long ring resistor is similar to dR / R for a short resistor oriented for radial voltage measurements, so the output signal is similar to the signal of known pressure transducers. Such an orientation allows one to obtain longer low-noise resistors with higher resistance and low resistivity than in the case of a known configuration.
    Since the thick-film resistor is sensitive to voltages parallel and perpendicular to the axis of the resistor, other configurations of resistor can be selected from Formula 1. The pressure measuring method using a pressure transducer with an elastic diaphragm on which one or more compound thick-film strain gages resistors are mounted, including diaphragm pressure measurement and measurement of the relative change in resistance of the strain gauges, characterized in that, in order to increase reliability, measure resistances of the strain gauges, resulting from the deformation of the diaphragm, both along and across the directions of orientation of the strain gauges, and changes in the resistance of the strain gauges are calculated by the formula
    d R
    - Shvh + Suvu + Cz6z + ex - woo - vg.
    to
    where Cx, Cy, Cz are the strain-sensitivity coefficients for deformation, respectively, in the longitudinal, transverse, and normal directions of the strain gauge film;
    ex, eu, and ez are the components of the strain tensor in the longitudinal, transverse, and normal directions of the strain gauge film,
    which are calculated according to the equations
    ex 4 0-) a2 + (31 -3} xV PI: ES 8h2
    (1-V2) a2 + (-1) x2) -
    ez Р- v1 (l (О4) 2a2- EG8 h2
     - (1 + v) Ax2), where P is the pressure applied to the diaphragm;
     v1 — Poisson's ratios for substrate and strain gauge materials;
    a is the radius of the diaphragm;
    Es, Er - Young's moduli of the strain gauge and substrate; . h is the thickness of the diaphragm;
    x is the radius at which the strain gauge is located.
    2; A pressure transducer, comprising a housing, an elastic diaphragm installed therein with at least one thick-film strain gauge placed on its surface and an electronic circuit for measuring changes in resistance of the strain gauges, in order to improve the reliability and accuracy of measurements In it, the thick-film strain gauge is made elongated in the direction of current flow.
    3. The transducer according to claim 2, that is, with the fact that it contains a thick-film strain gauge ring-shaped, and the diaphragm is made in the form of a disk, with the strain gauge placed on the peripheral part of the disk.
    4. The transducer according to claim 2, characterized in that the diaphragm is made in the form of a disk, on the surface of which are placed extra thick-film
    strain gauges, all strain gauges are elongated and parallel to each other.
    5. The converter according to the item 3, which differs from the fact that on the disk surface in
    on its central part, two strain gauges are installed on both sides of the center, made in the form of straight strips parallel to each other, and on the peripheral part of the disk there are two annular strain gauges arranged diametrically opposite to each other.
    6. The transducer according to claim 2, that is, with the fact that at least one
    The surface of the diaphragm is made round and on its central part on both sides of the center there are two thick-film strain gauges of annular shape, and on the peripheral part of the diaphragm there are two loop-shaped strain gauges on two diametrically opposite sides.
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    权利要求:
    Claims (6)
    [1]
    Claim
    1. A method of measuring pressure using a pressure transducer with an elastic diaphragm, on which one or more compound thick-film strain gages are placed. including loading the diaphragm with a measured pressure and measuring the relative change in the resistance of the strain gages, characterized in that, in order to increase reliability, measure the resistance changes of the strain gages resulting from deformation of the diaphragm both along and across the orientation directions of the strain gages, and the resistance changes of the strain gages are calculated by the formula d R = Cxvx + Suvu + Czez + βχ - wu - ez. to where Cx, C y , C z - strain sensitivity coefficients for deformation, respectively, in the longitudinal, transverse and normal directions of the strain gauge film;
    e x , e y and e z are the components of the strain tensor in the longitudinal, transverse and normal directions of the strain gauge film, which are calculated in accordance with the equations ex = (1 - ^) a 2 + (sL-3) x 2 ) ^ P];
    E * 8 h 2 e y = | [ΑΡ · (1 - ^) a 2 + (p2 - 1) x 2 ) - PJ;
    E 8 h z ex = 1 [P - ^ (ЗР {(1+ ) 2а 2 E r 8 h 2
    - (1 · * v) 4x 2 )], where P is the pressure applied to the diaphragm: um - Poisson's ratios for the materials of the substrate and the strain gauge;
    a is the radius of the diaphragm;
    Es, Er — Young's moduli of the strain gauge and substrate;
    . h is the thickness of the diaphragm;
    Ί χ is the radius over which the strain gage is located.
    [2]
    2. A pressure transducer comprising a housing, an elastic diaphragm installed in it with at least one thick-film strain gauge placed on its surface and an electronic circuit for measuring changes in the resistance of the strain gauges, characterized in that, in order to increase the reliability and accuracy of the measurements, it has a thick-film strain gauge made of elongated shape in the direction of current transmission.
    [3]
    3. The converter according to claim 2, characterized in that the thick-film strain gauge is ring-shaped in it, and the diaphragm is made in the form of a disk, and the strain gauge is located on the peripheral part of the disk.
    [4]
    4. The Converter according to claim 2, characterized in that the diaphragm is made in the form of a disk, on the surface of which additional thick-film strain gages are placed, and all strain gages have an elongated shape and are parallel relative to each other.
    [5]
    5. The Converter according to claim 3, characterized in that on the surface of the disk in its central part from two sides of the center there are two strain gauges made in the form of rectilinear strips parallel to each other, and on the peripheral part of the disk are two ring-shaped strain gauges located diametrically opposite to each other.
    [6]
    6. The Converter according to claim 2, with the fact that at least one surface of the diaphragm is made round and on it in its central part from two sides of the center there are two thick-film ring-shaped strain gages, and on the peripheral part of the diaphragm, from two diametrically opposite sides, two loop-shaped strain gages are placed.
    FIG. 2
    Fie 5
    I
    FIG. 3 FIG. 9
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    同族专利:
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    PL276065A1|1989-07-10|
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    IN169553B|1991-11-09|
    HK96594A|1994-09-23|
    KR890010545A|1989-08-09|
    ES2050163T3|1994-05-16|
    EP0320299A3|1991-03-27|
    HU210503B|1995-04-28|
    EP0320299B1|1994-03-02|
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    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    US3830100A|1973-02-22|1974-08-20|Statham Instrument Inc|Strain gauge transducer transient voltage protection|
    JPS5524273B2|1974-03-15|1980-06-27|
    JPS54113379A|1978-02-23|1979-09-04|Nec Corp|Pressure gauge|
    US4311980A|1978-10-12|1982-01-19|Fabrica Italiana Magneti Marelli, S.P.A.|Device for pressure measurement using a resistor strain gauge|
    JPS6073428A|1983-09-19|1985-04-25|Ford Motor Co|Combustion pressure sensor|
    US4586018A|1983-09-19|1986-04-29|Ford Motor Company|Combustion pressure sensor|
    JPS6165126A|1984-09-06|1986-04-03|Copal Denshi Kk|Pressure sensor|
    DE3689403T2|1985-04-26|1994-04-07|Wisconsin Alumni Res Found|SEMICONDUCTOR PRESSURE CONVERTER WITH SEALED CAVITY AND METHOD FOR IT.|KR890010548A|1987-12-16|1989-08-09|로버트 제이. 에드워즈|Dual pressure sensor|
    DK0469336T3|1990-07-28|1994-06-06|Endress Hauser Gmbh Co|Resistance Pressure Sensor|
    US6341528B1|1999-11-12|2002-01-29|Measurement Specialties, Incorporated|Strain sensing structure with improved reliability|
    WO2002061383A1|2001-01-31|2002-08-08|Silicon Valley Sensors, Inc.|Triangular chip strain sensing structure and corner,edge on a diaphragm|
    PL231259B1|2015-12-31|2019-02-28|Przed Cimat Spolka Z Ograniczona Odpowiedzialnoscia|Device for adjustment of variable geometry of turbocompressors|
    CN112595394A|2020-12-07|2021-04-02|锐马（福建）电气制造有限公司|Tangential arc strain gauge, radial strain gauge and supporting leg weighing sensor|
    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    US13187387A| true| 1987-12-11|1987-12-11|
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